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Nanofabrication Facility
Capabilities & Equipment > Characterization Systems
Cascade Microtech Summit 9000 Probe Station
The Cascade Microtech Summit 9000 probe station is a precise system for “on the wafer” device characterization. Capabilities include a of full measurement range of parametric testing, including noise, leakage, and stray capacitance. The system includes supporting instruments such as HP 4156B Precision Semiconductor Parameter Analyzer, HP4142B Modular DC Source/Monitor, HP 4284A Precision LCR Meter, Mitutoya microscope and assorted probes and fixtures.
Cascade Microtech Summit 9000 Probe Station
Measured I-V curve of an IR photo transistor
Features:
- DC or RF device characterization
- Wafer-level reliability testing
- E-testing, modeling or yield enhancement
- Thermal characterization
- High frequency probe heads, providing a 50 ohm transmission line between coaxial connector and device under test (DUT) pads
- Needle probe heads designed to contact power supply or low frequency control pads
- xyz-micro-positioner providing precise three-axis probe head position adjustments
