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Nanofabrication Facility
Capabilities & Equipment > Characterization Systems
FEI Environmental Scanning Electron Microscope
Photo of the FEI ESEM system.P
Image of a non-conducting sample obtained with this SEM in environmental mode: an array of 5-µm polystyrene microspheres on a glass slide substrate.
The FEI XL-30 Environmental SEM is a high-end electron microscope, with a five-axis tip-tilt/translation sample stage, field-emission source, and the capability to image non-conducting samples in a low-pressure water-vapor atmosphere.
Features:
- 20-nm imaging resolution
- Sample stage can be tilted up to 50 degrees under live imaging
- Environmental (“wet”) mode permits imaging of non-conducting samples without charging
- Field-emission source
- Accelerating voltage can be adjusted from 500 V to 30 kV
