Nanofabrication Facility

Capabilities & Equipment > Characterization Systems

Veeco AFM Dimension 3100

Our Atomic Force Microscope (AFM) system is a Veeco model Dimension 3100. The Dimension 3100 scanning probe microscope utilizes standard and advanced SPM imaging modes to measure surface characteristics for semiconductor wafers, lithography masks, magnetic media, CDs/DVDs, biomaterials, optics, and other samples up to 150mm in diameter. Precise laser tracking and the ability to change scanning techniques without tools guarantee flexibility and ease of use. The system's NanoScope 3D controller can scan from the maximum scan size to a few nanometers with full 16-bit resolution on all scan waveforms and on each axis.

Capabilities & Equipment

• Etching
• Lithography
• Deposition Systems
• Packaging Systems and Integration
• Characterization Systems
  • Cascade Microtech Summit 9000 probe station
  • Agilent 85106D Vector Network Analyzer
  • Agilent 8703B Lightwave Component Analyzer
  • Agilent Infiniium DC 86100
  • Agilent 86142B
  • Thermo Nicolet Nexus 870 FTIR
  • Philips X’Pert X-ray
  • FEI XL-30 Environmental Scanning Electron Microscope (SEM)
  • Confocal Raman Microscope System
  • Horiba Jobin-Yvon iHR320 Spectrometer
  • Horiba Jobin-Yvon UVISEL Visible-NearIR Spectroscopic Ellipsometer
  • Veeco Dimension 3100 Atomic Force Microscope
  • Photo- and Electro-luminescence Characterization System