Research Centers & Facilities
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Nanofabrication Facility
Capabilities & Equipment
Our nanofabrication facility is equipped with state-of-the-art capabilities for Deposition/Growth (MBE, CVD), Photolithography (Ebeam, UV, DUV), Etching (ICP, RIE), and Packaging.
Sample opto-electronic devices built and integrated in our facility are shown below.
For more details, please review our equipment (listed to the right) and view the slide slow.”
